Grantee Research Project Results
Publications Details for Grant Number R831459
A New Approach for Reducing Global Warming Emissions from Etching by Controlling Ion Energy and Neutral Fluxes
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| Reference Type | Citation | Progress Report Year | Document Sources |
|---|---|---|---|
| Dissertation/Thesis | Machima P. SiO2 and Si3N4 etch mechanisms in NF3/C2H4 plasma. Ph.D. Dissertation. University of Wisconsin-Madison, 2005. |
R831459 (Final) |
not available |
| Journal Article | Lee D, Ting Y-H, Oksuz L, Hershkowitz N. Measurement of plasma potential fluctuations by emissive probes in CF4 radio-frequency plasma. Plasma Sources Science and Technology 2006;15(4):873–878 doi:10.1088/0963-0252/15/4/034. |
R831459 (Final) |
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| Journal Article | Machima P, Hershkowitz N. SiO2 and Si3N4 etch mechanisms in NF3/hydrocarbon plasma. Journal of Physics D: Applied Physics 2006;39(4):673-684. |
R831459 (Final) |
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| Patent/Patent Application | Hershkowitz N, Denes FS, Manolache SO. Method and apparatus for producing colloidal nanoparticles in a dense medium plasma. 2006;(Patent no. 7,128,816) |
R831459 (Final) |
not available |
| Presentation | Machima P, Hershkowitz N. Silicon oxide and silicon nitride etching in inductive NF3/C2H4 plasma. Presented at the 206th Meeting, Electrochemical Society, Honolulu, HI, October 3-8, 2004. . |
R831459 (Final) |
not available |
| Presentation | Machima P, Hershkowitz N. Plasma etching of SiO2 and Si3N4 with NF3/C2H4-a new approach to reduce global warming gas production. Presented at the 57th Annual Gaseous Electronics Conference, Shannon, Ireland, September 26-29, 2004. |
R831459 (Final) |
not available |
| Presentation | Machima P, Hershkowitz N. SiO2 and Si3N4 etch mechanisms in NF3/C2H4 plasma. Presented at the 58th Annual Gaseous Electronics Conference, San Jose, CA, October 16-20, 2005. |
R831459 (Final) |
not available |
The perspectives, information and conclusions conveyed in research project abstracts, progress reports, final reports, journal abstracts and journal publications convey the viewpoints of the principal investigator and may not represent the views and policies of ORD and EPA. Conclusions drawn by the principal investigators have not been reviewed by the Agency.