Grantee Research Project Results
Publications submitted after final report Details for Grant Number R831459
A New Approach for Reducing Global Warming Emissions from Etching by Controlling Ion Energy and Neutral Fluxes
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Reference Type | Reference Title | Journal | Author | Citation | Progress Report Year (Date Added to Report) | Document Sources |
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Patent/Patent Application | Method and apparatus for producing colloidal nanoparticles in a dense medium plasma | None | Hershkowitz N, Denes FS, Manolache SO | Hershkowitz N, Denes FS, Manolache SO. Method and apparatus for producing colloidal nanoparticles in a dense medium plasma. 2006;(Patent no. 7,128,816) |
R831459 (Final) (08/10/10) |
not available |
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