Grantee Research Project Results
Publications submitted after final report Details for Grant Number R831456
Comprehensive Tools to Assess Environmental Impacts of and Improve the Design of Semiconductor Equipment and Processes
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| Reference Type | Citation | Progress Report Year (Date Added to Report) | Document Sources |
|---|---|---|---|
| Proceedings | Boyd S, Dornfield D, Krishnan N. Life cycle inventory of a CMOS chip. PROCEEDINGS OF THE 2006 IEEE INTERNATIONAL SYMPOSIUM ON ELECTRONICS & THE ENVIRONMENT, CONFERENCE RECORD 2006;253 |
R831456 (Final) (09/09/22) |
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| Proceedings | Zhang TW, Dornfeld DA. Energy use per worker-hour: evaluating the contribution of labor to manufacturing energy use . In: Takata S, Umeda Y, eds. Advances in Life Cycle Engineering for Sustainable Manufacturing Businesses: Proceedings of the 14th CIRP Conference on Life Cycle Engineering, Waseda University, Tokyo, Japan, June 11th–13th, 2007. London, UK: Springer 2007, pp. 189-193. |
R831456 (Final) (04/09/18) |
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| Proceedings | Zhang T, Bates S, Dornfield D. Operational energy analysis of plasmonic imaging lithography. PROCEEDINGS OF THE 2007 IEEE INTERNATIONAL SYMPOSIUM ON ELECTRONICS & THE ENVIRONMENT, CONFERENCE RECORD 2007;97 |
R831456 (Final) (09/09/22) |
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The perspectives, information and conclusions conveyed in research project abstracts, progress reports, final reports, journal abstracts and journal publications convey the viewpoints of the principal investigator and may not represent the views and policies of ORD and EPA. Conclusions drawn by the principal investigators have not been reviewed by the Agency.