Grantee Research Project Results
Publications submitted after final report Details for Grant Number R831456
Comprehensive Tools to Assess Environmental Impacts of and Improve the Design of Semiconductor Equipment and Processes
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Reference Type | Reference Title | Journal | Author | Citation | Progress Report Year (Date Added to Report) | Document Sources |
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Proceedings | Life cycle inventory of a CMOS chip | PROCEEDINGS OF THE 2006 IEEE INTERNATIONAL SYMPOSIUM ON ELECTRONICS & THE ENVIRONMENT, CONFERENCE RECORD | Boyd S, Dornfield D, Krishnan N | Boyd S, Dornfield D, Krishnan N. Life cycle inventory of a CMOS chip. PROCEEDINGS OF THE 2006 IEEE INTERNATIONAL SYMPOSIUM ON ELECTRONICS & THE ENVIRONMENT, CONFERENCE RECORD 2006;253 |
R831456 (Final) (09/09/22) |
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Proceedings | Energy use per worker-hour: evaluating the contribution of labor to manufacturing energy use. | None | Zhang TW, Dornfeld DA | Zhang TW, Dornfeld DA. Energy use per worker-hour: evaluating the contribution of labor to manufacturing energy use . In: Takata S, Umeda Y, eds. Advances in Life Cycle Engineering for Sustainable Manufacturing Businesses: Proceedings of the 14th CIRP Conference on Life Cycle Engineering, Waseda University, Tokyo, Japan, June 11th–13th, 2007. London, UK: Springer 2007, pp. 189-193. |
R831456 (Final) (04/09/18) |
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Proceedings | Operational energy analysis of plasmonic imaging lithography | PROCEEDINGS OF THE 2007 IEEE INTERNATIONAL SYMPOSIUM ON ELECTRONICS & THE ENVIRONMENT, CONFERENCE RECORD | Zhang T, Bates S, Dornfield D | Zhang T, Bates S, Dornfield D. Operational energy analysis of plasmonic imaging lithography. PROCEEDINGS OF THE 2007 IEEE INTERNATIONAL SYMPOSIUM ON ELECTRONICS & THE ENVIRONMENT, CONFERENCE RECORD 2007;97 |
R831456 (Final) (09/09/22) |
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