Main Title |
Glow Discharge Optical Spectroscopy for Microvolume Elemental Analysis and Sputtering Diagnostics. |
Other Authors |
|
Publisher |
Defense Technical Information Center |
Year Published |
1974 |
Report Number |
UILU-ENG-74-2234 R-668 |
OCLC Number |
227374723 |
Subjects |
Thin films ;
Microelectronics ;
Microanalysis ;
Theses ;
Surfaces ;
Atomic spectroscopy ;
Sputtering ;
Chemical analysis ;
Electrical and Electronic Equipment ;
Atomic and Molecular Physics and Spectroscopy
|
Holdings |
Library |
Call Number |
Additional Info |
Location |
Last Modified |
Checkout Status |
ESBD |
100 ILL CSL R-668 |
|
CPHEA/PESD Library/Corvallis,OR |
01/03/2017 |
|
Collation |
80 pages |
Contents Notes |
The ability to quantitatively measure trace concentrations in microvolume samples is quite important in the expanding areas of thin film and microelectronic device technologies. Equally important is the ability to obtain chemical composition vs. sample depth information. Some example applications include electrical contacts and lead bonding where impurities at the interface may have significant effects on adhesion, junction devices in which one would like to have an abrupt chemical transition from one material to another, epitaxial film growth, and diffused and implanted devices in which the dopant distribution profiles may differ from simple theory due to lattice strain, electric field enhancement and other effects. |
Place Published |
Ft. Belvoir |
Corporate Au Added Ent |
ILLINOIS UNIV URBANA COORDINATED SCIENCE LAB. |
PUB Date Free Form |
DEC 1974 |
BIB Level |
m |
Medium |
unmediated |
Content |
text |
Carrier |
volume |
Cataloging Source |
OCLC/T |
OCLC Time Stamp |
20161228061709 |
Language |
eng |
Origin |
OCLC |
Type |
CAT |
OCLC Rec Leader |
02054cam 22003973u 45010 |