| Main Title |
Multi Micro Beams for Ion Implantation. |
| Author |
Guerne, G. ;
Gloti, Ph. ;
|
| CORP Author |
Commissariat A L'Energie Atomique, Grenoble (France). Centre D'Etudes Nucleaires. |
| Year Published |
1970 |
| Report Number |
CONF-700945-2; |
| Stock Number |
CEA-CONF-1767 |
| Additional Subjects |
Accelerators ;
Circuits ;
|
| Holdings |
| Library |
Call Number |
Additional Info |
Location |
Last
Modified |
Checkout
Status |
| NTIS |
CEA-CONF-1767 |
Some EPA libraries have a fiche copy filed under the call number shown. |
|
07/26/2022 |
|
| Collation |
10p |
| Abstract |
For abstract, see NSA 25 18, number 43728. |
