Record Display for the EPA National Library Catalog


Main Title Waste reduction activities and options for a manufacturer of systems to produce semiconductors /
Author Ulbrecht, Alan. ; Watts, D. J.
Other Authors
Author Title of a Work
Watts, Daniel J.
CORP Author New Jersey Inst. of Tech., Newark.;Environmental Protection Agency, Cincinnati, OH. Risk Reduction Engineering Lab.
Publisher U.S. Environmental Protection Agency, Risk Reduction Engineering Laboratory,
Year Published 1992
Report Number EPA/600-S-92-050; EPA-R-815165; PB93123222
Stock Number PB93-123222
OCLC Number 27095805
Subjects Semiconductors--Waste disposal--Research--New Jersey
Additional Subjects Waste management ; Semiconductors ; Vapor deposition ; Hazardous materials ; Pollution abatement ; New Jersey ; Manufacturing ; Degreasing ; Implementation ; Metal coatings ; Filtration ; Revisions ; Performance evaluation ; Metal containing organic compounds ; Waste minimization ; Source reduction
Internet Access
Description Access URL
Library Call Number Additional Info Location Last
EJBD  EPA 600-S-92-050 c.1-2 Headquarters Library/Washington,DC 02/26/2013
ELBD ARCHIVE EPA 600-S-92-050 In Binder Received from HQ AWBERC Library/Cincinnati,OH 10/04/2023
ELBD RPS EPA 600-S-92-050 repository copy AWBERC Library/Cincinnati,OH 10/17/2014
EMBD  EPA/600/S-92/050 NRMRL/GWERD Library/Ada,OK 12/28/2001
NTIS  PB93-123222 Some EPA libraries have a fiche copy filed under the call number shown. 07/26/2022
Collation 2 pages ; 28 cm.
The U.S. Environmental Protection Agency (EPA) funded a project with the New Jersey Department of Environmental Protection and Energy (NJDEPE) to assist in conducting waste minimization assessments at thirty small- to medium-sized businesses in the state of New Jersey. One of the sites selected was a facility that manufactures systems for vapor deposition of organometallic compounds or metals used in the production of semiconductors. As part of the manufacturing process it is necessary to test the systems using the materials actually used in semiconductor production. Test deposition of materials containing arsenic, indium, or gallium, among others result in much of the waste stream. A site visit was made in 1990 during which several opportunities for waste minimization were identified. Options identified included changes in degreasing procedures and modifications to filtering systems. Implementation of the identified waste minimization opportunities was not part of the program. Percent waste reduction, net annual savings, implementation costs and payback periods were estimated.
"EPA/600-S-92-050." "October 1992." Shipping list no.: 92-0655-P.