Small Business Innovation Research (SBIR) - Phase II

Request for Applications closing date: May 25, 1996


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Identifier Abstract Principal Investigator Annual/ Final Reports Pubs Count Institution Project Period
<< SBIR PHASE II >>
1 68D70051
SBIR II
Recovery of Perfluorocarbons (PFCs) from Chemical Vapor Deposition Operations in the Semiconductor Industry Wijmans, J. (Hans) G.   Final

  Membrane Technology and Research Inc. September 1997 -
September 1999  
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