Grantee Research Project Results
Selected Publications Details for Grant Number 68D99050
Precision Cleaning/Submicron Level Cleaning With Liquid/Supercritical CO2 Technology
RFA:
Small Business Innovation Research (SBIR) - Phase I (1999)
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Publication Types - Journal
Articles - Publications Submitted
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Reference Type | Citation | Progress Report Year | Document Sources |
---|---|---|---|
Journal Article | Critical Point Drying and Cleaning for MEMS Technology, I. Jafri, H. Busta, and S. Walsh; Micromachining and Microfabrication SPIE, Vol.3880 (September 1999). |
68D99050 (Final) |
not available |
The perspectives, information and conclusions conveyed in research project abstracts, progress reports, final reports, journal abstracts and journal publications convey the viewpoints of the principal investigator and may not represent the views and policies of ORD and EPA. Conclusions drawn by the principal investigators have not been reviewed by the Agency.