Grantee Research Project Results
Journal Publications Details for Grant Number R828208
Development of Life Cycle Inventory Modules for Semiconductor Processing
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Reference Type | Citation | Progress Report Year | Document Sources |
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Journal Article | Murphy CF, Kenig GA, Allen DT, Laurent J-P, Dyer DE. Development of parametric material, energy, and emission inventories for wafer fabrication in the semiconductor industry. Environmental Science & Technology 2003;37(23):5373-5382. |
R828208 (Final) |
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