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RECORD NUMBER: 220 OF 1338

OLS Field Name OLS Field Data
Main Title Chemical vapor deposition in the silicon-carbon and boron-carbon-nitrogen systems
Author Besmann, Theodore M.
Publisher Oak Ridge National Laboratory ;
Year Published 1988
OCLC Number 24455677
Subjects Energy conservation--Chemical industry
Holdings
Library Call Number Additional Info Location Last
Modified
Checkout
Status
EJBM  TJ163.5.C54B47 Headquarters Library/Washington,DC 10/05/1991
Collation vii, 26 p.
Notes Head of title: Metals and ceramics division. "ORNL/TM-10884." "Contract no. DE-AC05-84OR21400"--T.p. "November 1988"--T.p.
Place Published Oak Ridge, Tenn. :
Corporate Au Added Ent Oak Ridge National Laboratory. ; Oak Ridge National Laboratory.
PUB Date Free Form 1988.
BIB Level m
Cataloging Source OCLC/T
OCLC Time Stamp 19910926082438
Language ENG
Origin OCLC
Type CAT
OCLC Rec Leader 00949nam 2200217Ka 45020