Main Title |
Chemical Vapor Deposition Process Equipment. Progress Through November 1970. |
Author |
Hal, G. J. ;
|
CORP Author |
Bendix Corp., Kansas City, Mo. |
Year Published |
1971 |
Report Number |
AT(29-1)-613; |
Stock Number |
BDX-613-269 |
Additional Subjects |
Vapor deposition ;
Equipment ;
Chemical vapor deposition ;
|
Holdings |
Library |
Call Number |
Additional Info |
Location |
Last Modified |
Checkout Status |
NTIS |
BDX-613-269 |
Some EPA libraries have a fiche copy filed under the call number shown. |
|
07/26/2022 |
|
Collation |
22p |
Abstract |
For abstract, see NSA 25 18, number 44223. |
Title Annotations |
+++Prog. RPT. On Chemical Vapor Deposition Process Equipment, 11/70 |
PUB Date Free Form |
May 71, |
Category Codes |
13H; 69I; 69H |
NTIS Prices |
PC A02 MF A01 |
Document Type |
NT |
Cataloging Source |
NTIS/MT |
Control Number |
326500727 |
Origin |
NTIS |
Type |
CAT |