| Main Title |
Chemical Vapor Deposition Process Equipment. Progress Through November 1970. |
| Author |
Hal, G. J. ;
|
| CORP Author |
Bendix Corp., Kansas City, Mo. |
| Year Published |
1971 |
| Report Number |
AT(29-1)-613; |
| Stock Number |
BDX-613-269 |
| Additional Subjects |
Vapor deposition ;
Equipment ;
Chemical vapor deposition ;
|
| Holdings |
| Library |
Call Number |
Additional Info |
Location |
Last
Modified |
Checkout
Status |
| NTIS |
BDX-613-269 |
Some EPA libraries have a fiche copy filed under the call number shown. |
|
07/26/2022 |
|
| Collation |
22p |
| Abstract |
For abstract, see NSA 25 18, number 44223. |
| Title Annotations |
+++Prog. RPT. On Chemical Vapor Deposition Process Equipment, 11/70 |
| PUB Date Free Form |
May 71, |
| Category Codes |
13H; 69I; 69H |
| NTIS Prices |
PC A02 MF A01 |
| Document Type |
NT |
| Cataloging Source |
NTIS/MT |
| Control Number |
326500727 |
| Origin |
NTIS |
| Type |
CAT |
