Record Display for the EPA National Library Catalog

RECORD NUMBER: 9 OF 12

OLS Field Name OLS Field Data
Main Title Waste minimization assessment for a manufacturer of silicon-controlled rectifiers and Schottky rectifiers /
Author Edwards, H. W. ; Kostrzewa, M. ; Miller, P. S. ; Looby, G. P.
Other Authors
Author Title of a Work
Edwards, Harry W.
CORP Author Colorado State Univ., Fort Collins. Dept. of Mechanical Engineering. ;University City Science Center, Philadelphia, PA.;Environmental Protection Agency, Cincinnati, OH. Risk Reduction Engineering Lab.
Publisher U.S. Environmental Protection Agency, Risk Reduction Engineering Laboratory,
Year Published 1992
Report Number EPA/600-S-92-036; EPA-R-814903
Stock Number PB93-123099
OCLC Number 26987803
Subjects Waste minimization--Research--Colorado. ; Rectifier instruments--Research--Colorado.
Additional Subjects Waste management ; Pollution abatement ; Hazardous materials ; Silicon controlled rectifiers ; Manufacturing ; Waste water ; Water pollution control ; Chemical vapor deposition ; Air pollution control ; Rinsing ; Wafers ; Etching ; Cleaning ; Waste minimization ; Schottky rectifiers ; Source reduction ; SIC 20-39
Internet Access
Description Access URL
http://nepis.epa.gov/Exe/ZyPDF.cgi?Dockey=30003V7K.PDF
Holdings
Library Call Number Additional Info Location Last
Modified
Checkout
Status
EHAM  TD793.9E33 1992 Region 1 Library/Boston,MA 04/29/2016
EJAD  EPA 600/S-92-036 Region 3 Library/Philadelphia, PA 06/01/2011
EJBD ARCHIVE EPA 600-S-92-036 In Binder Headquarters Library/Washington,DC 10/30/2017
EJBD  EPA 600-S-92-036 c.1-2 Headquarters Library/Washington,DC 04/25/2014
EJED  EPA/600/S-92/036 OCSPP Chemical Library/Washington,DC 10/05/2001
ELBD RPS EPA 600-S-92-036 repository copy AWBERC Library/Cincinnati,OH 02/01/2016
EMBD  EPA/600/S-92/036 GWERD Library/Ada,OK 12/28/2001
NTIS  PB93-123099 Most EPA libraries have a fiche copy filed under the call number shown. Check with individual libraries about paper copy. NTIS 01/01/1988
Collation 1 volume.
Abstract
The WMAC team at Colorado State University performed an assessment at a plant manufacturing devices for converting alternating current into direct current (silicon-controlled rectifiers and Schottky rectifiers) -- approximately 2.5 million units per year. Rectifier manufacture is a two step process: wafer fabrication and assembly. Silicon wafers are doped, spin coated, cleaned, and rinsed. Next, the wafers are etched and the resist is stripped to produce a final groove pattern. Layers of polysilicate and silicon nitride are deposited via chemical vapor deposition, silicon glass is fused to the surface ground, and then the wafer is cut into chips or dice. The dice are tested, sorted, and evaluated and then transferred to assembly. The team's report, detailing findings and recommendatios, indicated that the majority of waste was generated by the stack scrubbers used to remove contaminants from exhausted plant air and that the greatest savings could be obtained by redirecting reject water from the reverse osmosis unit to the stack scrubbers to eliminate the wastewater stream from the reverse osmosis unit.
Notes
"EPA/600-S-92-036." "Sept. 1992." Shipping list no.: 92-0605-P.