||Environmental technology initiative : chemical-free cleaning of semiconductors by the radiation process /
Legge, Ronald N. ;
Thompson, D. L. ;
Convey, D. J. ;
Peterson, J. D.
||Motorola, Inc., Tempe, AZ.;National Risk Management Research Lab., Cincinnati, OH. Sustainable Technology Div.
|| U.S. Environmental Protection Agency, Office of Research and Development, National Risk Management Research Laboratory,
Dry methods ;
Flat panel displays ;
Mechanical polishing ;
Chemical polishing ;
Technology innovation ;
Pollution prevention ;
||Most EPA libraries have a fiche copy filed under the call number shown. Check with individual libraries about paper copy.
||56 pages ; 28 cm
The Radiance Process (R) is a patented dry process for removing contaminants from surfaces. It uses light, usually from a pulsed laser and a gas inert to the surface, to entrain released contaminants. The focus of this effort is to assess the applicability of the Radiance Process (R) to the semiconductor industry and its pollution prevention potential. This report discusses the results of experiments conducted to investigate the effectiveness of the Radiance Process (R) in removing chemical mechanical polishing (CMP) slurries from wafers, cleaning flat panel display glass, and removing particles from bare silicon wafers. The results show that post-CMP cleaning using the Radiance Process (R) can restore bare silicon waters to near virgin conditions. For flat panel display material, the Radiance Process (R) was used to clean vendor-supplied float glass substrates used in fabrication. This resulted in reducing total particle counts in excess of 5000 to below 100. These results were equal to, or, in some cases, better than current wet cleaning processes. Contamination not removed by wet processing was further reduced by using the Radiance Process (R). Particle removal from bare silicon wafers was tested in two specific conditions with no statistically significant repeatable removal rates.
Paul M. Randall, Project officer. "EPA/600/R-98/153." "PB99-126518." Microfiche.