The Monolithic Memories (MM) site is a former semiconductor manufacturing facility located in Sunnyvale and Santa Clara, California. Land surrounding the site is used for commercial and light industrial purposes. The site lies within the confined area of the Santa Clara Valley ground water basin, which consists of various upper and lower aquifer zones. Ground water from the basin provides up to 50 percent of the municipal drinking water for Santa Clara Valley residents. Remediation of the MM site has been combined with another National Priorities List (NPL) site, National Semiconductor (NSC), because both sites contribute to the same ground water contamination problem. The combined remediation has been divided into two Operable Units (OUs). The Record of Decision addresses OU1, which consists of three subunits. The Record of Decision (ROD) addresses remediation of contaminated soil on the facility property and ground water in the upper aquifer zone as OU1. OU2 will address remaining soil and ground water problems associated with the western portion of the ground water contaminant plume. The primary contaminants of concern affecting the soil and ground water are VOCs including benzene, PCE, TCE, toluene, and xylenes; and other organics including PAHs and phenols. The selected remedial action for the site is included.