Record Display for the EPA National Library Catalog

RECORD NUMBER: 36 OF 37

OLS Field Name OLS Field Data
Main Title Waste reduction activities and options for a manufacturer of systems to produce semiconductors /
Author Ulbrecht, Alan. ; Watts, D. J.
Other Authors
Author Title of a Work
Watts, Daniel J.
CORP Author New Jersey Inst. of Tech., Newark.;Environmental Protection Agency, Cincinnati, OH. Risk Reduction Engineering Lab.
Publisher U.S. Environmental Protection Agency, Risk Reduction Engineering Laboratory,
Year Published 1992
Report Number EPA/600/S-92/050; EPA-R-815165
Stock Number PB93-123222
Subjects Semiconductors--Waste disposal--Research--New Jersey.
Additional Subjects Waste management ; Semiconductors ; Vapor deposition ; Hazardous materials ; Pollution abatement ; New Jersey ; Manufacturing ; Degreasing ; Implementation ; Metal coatings ; Filtration ; Revisions ; Performance evaluation ; Metal containing organic compounds ; Waste minimization ; Source reduction
Internet Access
Description Access URL
http://nepis.epa.gov/Exe/ZyPDF.cgi?Dockey=30003V90.PDF
Holdings
Library Call Number Additional Info Location Last
Modified
Checkout
Status
NTIS  PB93-123222 Most EPA libraries have a fiche copy filed under the call number shown. Check with individual libraries about paper copy. NTIS 01/01/1988
Collation 2 pages ; 28 cm.
Abstract
The U.S. Environmental Protection Agency (EPA) funded a project with the New Jersey Department of Environmental Protection and Energy (NJDEPE) to assist in conducting waste minimization assessments at thirty small- to medium-sized businesses in the state of New Jersey. One of the sites selected was a facility that manufactures systems for vapor deposition of organometallic compounds or metals used in the production of semiconductors. As part of the manufacturing process it is necessary to test the systems using the materials actually used in semiconductor production. Test deposition of materials containing arsenic, indium, or gallium, among others result in much of the waste stream. A site visit was made in 1990 during which several opportunities for waste minimization were identified. Options identified included changes in degreasing procedures and modifications to filtering systems. Implementation of the identified waste minimization opportunities was not part of the program. Percent waste reduction, net annual savings, implementation costs and payback periods were estimated.
Notes
"EPA/600/S-92/050." "October 1992." Microfiche.