Record Display for the EPA National Library Catalog

RECORD NUMBER: 220 OF 1340

OLS Field Name OLS Field Data
Main Title Chemical vapor deposition in the silicon-carbon and boron-carbon-nitrogen systems
Author Besmann, Theodore M.
Publisher Oak Ridge National Laboratory ;
Year Published 1988
OCLC Number 24455677
Subjects Energy conservation--Chemical industry
Holdings
Library Call Number Additional Info Location Last
Modified
Checkout
Status
EJBM  TJ163.5.C54B47 Headquarters Library/Washington,DC 10/05/1991
Collation vii, 26 p.
Notes
Head of title: Metals and ceramics division. "ORNL/TM-10884." "Contract no. DE-AC05-84OR21400"--T.p. "November 1988"--T.p.