| Main Title |
Waste reduction activities and options for a manufacturer of systems to produce semiconductors / |
| Author |
Ulbrecht, Alan. ;
Watts, D. J.
|
| Other Authors |
|
| CORP Author |
New Jersey Inst. of Tech., Newark.;Environmental Protection Agency, Cincinnati, OH. Risk Reduction Engineering Lab. |
| Publisher |
U.S. Environmental Protection Agency, Risk Reduction Engineering Laboratory, |
| Year Published |
1992 |
| Report Number |
EPA/600-S-92-050; EPA-R-815165; PB93123222 |
| Stock Number |
PB93-123222 |
| OCLC Number |
27095805 |
| Subjects |
Semiconductors--Waste disposal--Research--New Jersey
|
| Additional Subjects |
Waste management ;
Semiconductors ;
Vapor deposition ;
Hazardous materials ;
Pollution abatement ;
New Jersey ;
Manufacturing ;
Degreasing ;
Implementation ;
Metal coatings ;
Filtration ;
Revisions ;
Performance evaluation ;
Metal containing organic compounds ;
Waste minimization ;
Source reduction
|
| Internet Access |
|
| Holdings |
| Library |
Call Number |
Additional Info |
Location |
Last
Modified |
Checkout
Status |
| EJBD ARCHIVE |
EPA 600-S-92-050 |
In Binder |
Headquarters Library/Washington,DC |
10/30/2017 |
| EJBD |
EPA 600-S-92-050 |
c.1-2 |
Headquarters Library/Washington,DC |
02/26/2013 |
| ELBD RPS |
EPA 600-S-92-050 |
repository copy |
AWBERC Library/Cincinnati,OH |
10/17/2014 |
| EMBD |
EPA/600/S-92/050 |
|
NRMRL/GWERD Library/Ada,OK |
12/28/2001 |
| NTIS |
PB93-123222 |
Some EPA libraries have a fiche copy filed under the call number shown. |
|
07/26/2022 |
|
| Collation |
2 pages ; 28 cm. |
| Abstract |
The U.S. Environmental Protection Agency (EPA) funded a project with the New Jersey Department of Environmental Protection and Energy (NJDEPE) to assist in conducting waste minimization assessments at thirty small- to medium-sized businesses in the state of New Jersey. One of the sites selected was a facility that manufactures systems for vapor deposition of organometallic compounds or metals used in the production of semiconductors. As part of the manufacturing process it is necessary to test the systems using the materials actually used in semiconductor production. Test deposition of materials containing arsenic, indium, or gallium, among others result in much of the waste stream. A site visit was made in 1990 during which several opportunities for waste minimization were identified. Options identified included changes in degreasing procedures and modifications to filtering systems. Implementation of the identified waste minimization opportunities was not part of the program. Percent waste reduction, net annual savings, implementation costs and payback periods were estimated. |
| Notes |
"EPA/600-S-92-050." "October 1992." Shipping list no.: 92-0655-P. |
