Record Display for the EPA National Library Catalog
RECORD NUMBER: 8 OF 18| Main Title | Microchip fabrication : a practical guide to semiconductor processing / | |||||||||||
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| Author | Van Zant, Peter. | |||||||||||
| Publisher | McGraw-Hill, | |||||||||||
| Year Published | 2004 | |||||||||||
| OCLC Number | 54857930 | |||||||||||
| ISBN | 0071432418; 9780071432412 | |||||||||||
| Subjects | Semiconductors--Design and construction ; Integrated circuits--Design and construction ; Fertigung ; Fertigungstechnik ; Halbleiterbauelement ; Integrierte Schaltung | |||||||||||
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| Edition | 5th ed. | |||||||||||
| Collation | xiii, 642 pages : illustrations ; 24 cm | |||||||||||
| Notes | Includes bibliographical references and index. |
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| Contents Notes | The semiconductor industry -- Properties of semiconductor materials and chemicals -- Crystal growth and silicon wafer preparation -- Overview of wafer fabrication -- Contamination control -- Productivity and process yields -- Oxidation -- The 10-step patterning process-surface preparation to exposure -- The 10-step patterning process-developing to final inspection -- Advanced photolithography processes -- Doping -- Layer deposition -- Metallization -- Process and device evaluation -- The business of wafer fabrication -- Introduction to devices and integrated circuit formation -- Introduction to integrated circuits -- Packaging. |