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RECORD NUMBER: 7 OF 7

Main Title Glow Discharge Optical Spectroscopy for Microvolume Elemental Analysis and Sputtering Diagnostics.
Other Authors
Author Title of a Work
Natarajan, Bangalore Ramaswamiengar.
Publisher Defense Technical Information Center
Year Published 1974
Report Number UILU-ENG-74-2234 R-668
OCLC Number 227374723
Subjects Thin films. ; Microelectronics. ; Microanalysis. ; Theses. ; Surfaces. ; Atomic spectroscopy. ; Sputtering. ; Chemical analysis. ; Electrical and Electronic Equipment. ; Atomic and Molecular Physics and Spectroscopy.
Holdings
Library Call Number Additional Info Location Last
Modified
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Status
ESBD  100 ILL CSL R-668 CPHEA/PESD Library/Corvallis,OR 01/03/2017
Collation 80 pages
Contents Notes
The ability to quantitatively measure trace concentrations in microvolume samples is quite important in the expanding areas of thin film and microelectronic device technologies. Equally important is the ability to obtain chemical composition vs. sample depth information. Some example applications include electrical contacts and lead bonding where impurities at the interface may have significant effects on adhesion, junction devices in which one would like to have an abrupt chemical transition from one material to another, epitaxial film growth, and diffused and implanted devices in which the dopant distribution profiles may differ from simple theory due to lattice strain, electric field enhancement and other effects.