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OLS Field Name OLS Field Data
Full Record Document Number: 1
Main Title Environmental technology initiative : chemical-free cleaning of semiconductors by the radiation process /
Author Legge, Ronald N., ; Thompson, D. L. ; Convey, D. J. ; Peterson, J. D.
Other Authors
Author Title of a Work
Thompson, Dan L.,
Convey, Diana J.,
Peterson, Joel D.,
CORP Author Motorola, Inc., Tempe, AZ.;National Risk Management Research Lab., Cincinnati, OH. Sustainable Technology Div.
Publisher U.S. Environmental Protection Agency, Office of Research and Development, National Risk Management Research Laboratory, National Technical Information Service (NTIS)
Year Published 1998
Report Number EPA/600/R-98/153
Stock Number PB99-126518
OCLC Number 946645538
Additional Subjects Semiconductors ; Cleaning ; Dry methods ; Waters ; Silicon ; Removal ; Particles ; Flat panel displays ; Lasers ; Slurries ; Mechanical polishing ; Chemical polishing ; Technology innovation ; Pollution prevention ; Waste minimization
Holdings
Library Call Number Additional Info Location Last
Modified
Checkout
Status
ELBD RPS EPA 600-R-98-153 repository 2 copies AWBERC Library/Cincinnati,OH 04/28/2016
ELBD  EPA 600-R-98-153 AWBERC Library/Cincinnati,OH 05/03/2016
NTIS  PB99-126518 Most EPA libraries have a fiche copy filed under the call number shown. Check with individual libraries about paper copy. NTIS 07/22/2019
Collation viii, 24 pages : figures, tables ; 28 cm