TY  - PAT
A1  - Berg, J E
A1  - Bertin, C L
A1  - Rueckes, T 
T1  - Non-volatile electromechanical field effect devices and circuits using same and methods of forming same
Y1  - 2007/09/25
N1  - SU833543
VL  - Appl. No.: 10/967,858 Filed: October 18, 2004
IS  - Patent no. 7,274,064
ER  -