TY  - PAT
A1  - Corrigan, T D
A1  - Zachariah, M R
A1  - Tsai, D H
A1  - Phaneuf, R J
A1  - Kim, S H
T1  - Method and system for controllable deposition of nanoparticles on a substrate
Y1  - 2007/05/17
N1  - SU833148
VL  - Serial No.: 360440 Series Code: 11 Filed: February 24, 2006
IS  - Patent appl. no. 20070111537
ER  -