TY - THES A1 - Laurent, J P T1 - Modeling organic particulate matter formation. N1 - R828208 ER - TY - THES A1 - Schuppe, J L T1 - Design of a life cycle inventory methodology for semiconductor manufacturing. N1 - R828208 ER - TY - JOUR A1 - Murphy, C F A1 - Kenig, G A A1 - Allen, D T A1 - Laurent, J P A1 - Dyer, D E T1 - Development of parametric material, energy, and emission inventories for wafer fabrication in the semiconductor industry. Y1 - 2003// N1 - R828208 JF - ENVIRONMENTAL SCIENCE & TECHNOLOGY J1 - ENVIRON SCI TECHNOL J2 - Enviornmenal Research J3 - ENVIRONMENTAL SCIENCE & TECHNOLOGY VL - 37 IS - 23 SP - 5373 EP - 5382 ER - TY - CONF A1 - Laurent, J P A1 - Murphy, C F A1 - Allen, D T A1 - Schuppe, J L T1 - Life cycle inventory for semiconductor manufacturing. N1 - R828208 ER - TY - CONF A1 - Murphy, C F T1 - Development of parametric inventories for semiconductor wafer fabrication. N1 - R828208 ER - TY - CONF A1 - Murphy, C F T1 - Development of parametric inventories for semiconductor wafer fabrication. N1 - R828208 ER - TY - CONF A1 - Murphy, C F A1 - Kenig, G A A1 - Allen, D T A1 - Laurent, J P T1 - Life cycle inventory development for wafer fabrication in semiconductor manufacturing. N1 - R828208 ER - TY - CONF A1 - Murphy, C F A1 - Laurent, J P A1 - Allen, D T A1 - Schuppe, J L T1 - Life cycle inventory for semiconductor manufacturing. N1 - R828208 ER - TY - CONF A1 - Schuppe, J L A1 - Murphy, C F A1 - Allen, D T T1 - Design of a Life cycle inventory for wafer semiconductor manufacturing. N1 - R828208 ER - TY - CONF A1 - Murphy, C F A1 - Laurent, J P A1 - Allen, D T T1 - Life cycle inventory development for wafer fabrication in semiconductor manufacturing. N1 - R828208 ER -