TY  - CONF
A1  - Rumaiz, A K
A1  - Shah, S I
A1  - Ni, C 
A1  - Demaree, J D
A1  - Hirvonen, J K
T1  - Reactive sputtering of nanostructured WC<sub>x</sub>.
Y1  - 2002/11/
N1  - R829624
VL  - 750
SP  - Y5.14
ER  -