TY  - PAT
A1  - Routkevitch, D 
A1  - Mardilovich, P 
A1  - Govyadinov, A 
A1  - Hooker, S 
A1  - Williams, S S
T1  - Nanostructured ceramic platform for micromachined devices and device arrays
Y1  - 2004/03/16
N1  - 68D98163
IS  - Patent no. 6,705,152
ER  - 


TY  - PAT
A1  - Yadav, T 
A1  - Routkevitch, D 
A1  - Mardilovich, P 
A1  - Govyadinov, A 
A1  - Hooker, S 
A1  - Williams, S S
T1  - Semiconductor and device nanotechnology and methods for their manufacture
Y1  - 2005/09/20
N1  - 68D98144
N1  - 68D60029
N1  - 68D01034
N1  - 68D98163
N1  - 68D70012
IS  - Patent no. 6,946,197
ER  -