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Development of Life Cycle Inventory Modules for Semiconductor Processing
Grant Number R828208
RFA: Technology for a Sustainable Environment (1999)

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Journal Article (1)
Reference Type Citation Progress Report Year Document Sources
Journal Article Murphy CF, Kenig GA, Allen DT, Laurent J-P, Dyer DE. Development of parametric material, energy, and emission inventories for wafer fabrication in the semiconductor industry. Environmental Science & Technology 2003;37(23):5373-5382. R828208 (Final)