Grantee Research Project Results
** The following contact information is the latest on record and may not be up to date. | |
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Name: | Satya Myneni |
Location:v | Georgia Institute of Technology |
E-mail: | |
Phone: | |
Address: | Georgia Institute of Technology |
City: | Atlanta |
State: | GA |
Zip Code: | 30332 |
Grant Number | Project Title | Abstract Type | Project Period | |
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Co-Investigator: | ||||
R829554 | Removal of Photoresist and Post-Plasma Etch Sidewall Films Using Superciritical and Subcritical CO2 with Additives | Grant | January 1, 2002 through December 31, 2004 |
The perspectives, information and conclusions conveyed in research project abstracts, progress reports, final reports, journal abstracts and journal publications convey the viewpoints of the principal investigator and may not represent the views and policies of ORD and EPA. Conclusions drawn by the principal investigators have not been reviewed by the Agency.