Grantee Research Project Results
Recovery of Perfluorocarbons (PFCs) from Chemical Vapor Deposition Operations in the Semiconductor Industry
EPA Contract Number: 68D70051Title: Recovery of Perfluorocarbons (PFCs) from Chemical Vapor Deposition Operations in the Semiconductor Industry
Investigators: Wijmans, J. (Hans) G.
Small Business: Membrane Technology and Research Inc.
EPA Contact: Richards, April
Phase: II
Project Period: September 1, 1997 through September 1, 1999
Project Amount: $225,000
RFA: Small Business Innovation Research (SBIR) - Phase II (1997) Recipients Lists
Research Category: Small Business Innovation Research (SBIR)
Description:
Perfluorocarbons (PFCs), particularly perfluoroethane (C2F6), are used by the semiconductor industry in wafer etch processes and in cleaning chemical vapor deposition (CVD) tools. There are about 200 semiconductor plants worldwide, each using on average 100,000 lbs/year of C2F6. The industry is growing rapidly and is currently adding 50 plants each year. Much of the C2F6 used is released to the atmosphere. Although the total release of C2F6 is relatively small, the global warming potential of this gas is so large that it contributes significantly to the greenhouse effect. The estimated lifetime of C2F6 in the atmosphere is at least 10,000 years, and its global warming potential is 13,500 times higher than that of carbon dioxide. Because of these environmental concerns and because of the important uses of C2F6, the semiconductor industry is actively searching for recovery technologies. The Phase I work demonstrated that membranes can effectively concentrate C2F6 and other PFCs. Final recovery then is achieved by a condensation step. A technical and economic analysis indicated that a simple payback time of less than 1 year can be achieved.
In the Phase II project, a demonstration system will be built and operated at a semiconductor facility. Support for system development and testing will be provided by a company that specializes in the development and marketing of semiconductor capital equipment.
Supplemental Keywords:
small business, SBIR, pollution prevention, air emissions, engineering, chemistry., Sustainable Industry/Business, RFA, Air, Scientific Discipline, Technology for Sustainable Environment, Chemical Engineering, Engineering, Chemistry, Sustainable Environment, Environmental Chemistry, Engineering, Chemistry, & Physics, Chemistry and Materials Science, cleaner production/pollution prevention, climate change, Environmental Engineering, perflurocarbons (PFCs), environmental monitoring, global change, semiconductor manufacturing, perfluoroethane recovery , recovery, chemical vapor deposition, semiconductor industry, recovery technologies, greenhouse gases, C2F6Progress and Final Reports:
The perspectives, information and conclusions conveyed in research project abstracts, progress reports, final reports, journal abstracts and journal publications convey the viewpoints of the principal investigator and may not represent the views and policies of ORD and EPA. Conclusions drawn by the principal investigators have not been reviewed by the Agency.