Recovery of Perfluoroethane from Chemical Vapor Deposition Operations in the Semiconductor Industry

EPA Contract Number: 68D60028
Title: Recovery of Perfluoroethane from Chemical Vapor Deposition Operations in the Semiconductor Industry
Investigators: Pinnau, Ingo
Small Business: Membrane Technology and Research Inc.
EPA Contact: Manager, SBIR Program
Phase: I
Project Period: September 1, 1996 through March 1, 1997
Project Amount: $70,000
RFA: Small Business Innovation Research (SBIR) - Phase I (1996) RFA Text |  Recipients Lists
Research Category: SBIR - Air Pollution , Small Business Innovation Research (SBIR) , Air Quality and Air Toxics


Perfluorocarbons, particularly perfluoroethane (C2F6) are used to clean chemical vapor deposition (CVD) chambers in the semi-conductor industry. Much of the C2F6 used is released to the atmosphere. Although the total release of C2F6 is relatively small, the global warming potential of this gas is so large that it contributes significantly to the greenhouse effect. The estimated lifetime of C2F6 in the atmosphere is at least 10,000 years, and its global warming potential is 13,500 times higher than that of carbon dioxide. Because of these environmental concerns, Du Pont, the major producer of C2F6 will require customers to emit no more than 20% of the chemical purchased after December 1996. The C2F6 used in a typical semiconductor plan has a recovery value of $0.50-1.00 million/year, providing, in addition, an economic incentive for recovery. Membrane Technology and Research, Inc., propose to develop and demonstrate an innovative membrane separation process to recover 80% to 95% of the C2F6 used in CVD operations

In the Phase I project, they will evaluate three candidate membrane materials for this application, develop thin-film composite membranes, and fabricate and evaluate bench-scale membrane modules. In Phase II, the process will be scaled up to the field demonstration stage.

Supplemental Keywords:

small business, SBIR, air emissions, engineering, chemistry, reuse, recycle., RFA, Industry Sectors, Scientific Discipline, Air, Sustainable Industry/Business, Chemical Engineering, cleaner production/pollution prevention, Environmental Chemistry, Manufacturing - NAIC 31-33, climate change, Atmospheric Sciences, Engineering, Chemistry, & Physics, Environmental Engineering, environmental monitoring, emission control technologies, chemcial vapor deposition, perfluoroethane recovery, cleaner production, environmentally conscious manufacturing, global change, membrane separation process, semiconductor industry, clean technology, green house gas concentrations, chemical vapor deposition, air pollution, ambient emissions, greenhouse gases, perfluoroethane recovery , innovative technology, global warming, emissions contol engineering, air emissions, industrial innovations, air quality, ambient air pollution, climate variability, green chemistry

Progress and Final Reports:

  • Final