TY - CONF A1 - Boyd, S A1 - Dornfeld, D A1 - Krishnan, N A1 - Moalem, M T1 - Environmental challenges for 45-nm and 32-nm node CMOS logic. Y1 - 2007// N1 - R831456 ER - TY - CONF A1 - Yuan, C T1 - A decision-based analysis of compressed air usage patterns in automotive manufacturing. Y1 - 2005// N1 - R831456 ER - TY - CONF A1 - Zhang, T W A1 - Bates, S W A1 - Dornfeld, D A T1 - Operational energy use of plasmonic imaging lithography. Y1 - 2007// N1 - R831456 ER - TY - CONF A1 - Zhang, T A1 - Boyd, S A1 - Vijayaraghavan, A A1 - Dornfeld, D T1 - Energy use in nanoscale manufacturing. Y1 - 2006// N1 - R831456 ER - TY - CONF A1 - Zhang, T A1 - Dornfeld, D T1 - Energy use per worker-hour: evaluating the contribution of labor to manufacturing energy use. Y1 - 2007// N1 - R831456 ER - TY - CONF A1 - Boyd, S A1 - Dornfield, D A1 - Krishnan, N T1 - Life cycle inventory of a CMOS chip Y1 - 2006/07/05 N1 - R831456 JF - PROCEEDINGS OF THE 2006 IEEE INTERNATIONAL SYMPOSIUM ON ELECTRONICS & THE ENVIRONMENT, CONFERENCE RECORD SP - 253 ER - TY - CONF A1 - Boyd, S A1 - Dornfeld, D A1 - Krishnan, N T1 - Life cycle inventory of a CMOS chip. Y1 - 2006// N1 - R831456 ER - TY - CONF A1 - Boyd, S A1 - Dornfeld, D A1 - Krishnan, N A1 - Moalem, M T1 - Environmental challenges for 45-nm and 32-nm node CMOS logic. Y1 - 2007// N1 - R831456 ER - TY - CONF A1 - Zhang, T W A1 - Boyd, S A1 - Vijayaraghavan, A A1 - Dornfeld, D T1 - Energy use in nanoscale manufacturing. Y1 - 2006// N1 - R831456 ER - TY - CONF A1 - Zhang, T W A1 - Dornfeld, D A T1 - Energy use per worker-hour: evaluating the contribution of labor to manufacturing energy use. Y1 - 2007/09/ N1 - R831456 SP - 189 EP - 193 ER - TY - CONF A1 - Zhang, T W A1 - Bates, S W A1 - Dornfeld, D A T1 - Operational energy analysis of plasmonic imaging lithography. Y1 - 2007// N1 - R831456 ER - TY - CONF A1 - Zhang, T A1 - Bates, S A1 - Dornfield, D T1 - Operational energy analysis of plasmonic imaging lithography Y1 - 2007/06/04 N1 - R831456 JF - PROCEEDINGS OF THE 2007 IEEE INTERNATIONAL SYMPOSIUM ON ELECTRONICS & THE ENVIRONMENT, CONFERENCE RECORD SP - 97 ER -