Grantee Research Project Results

Recovery of Perfluoroethane from Chemical Vapor Deposition Operations in the Semiconductor Industry

EPA Contract Number: 68D60028
Title: Recovery of Perfluoroethane from Chemical Vapor Deposition Operations in the Semiconductor Industry
Investigators: Pinnau, Ingo
Small Business: Membrane Technology and Research Inc.
EPA Contact: Richards, April
Phase: I
Project Period: September 1, 1996 through March 1, 1997
Project Amount: $70,000
RFA: Small Business Innovation Research (SBIR) - Phase I (1996) RFA Text |  Recipients Lists
Research Category: SBIR - Air Pollution , Small Business Innovation Research (SBIR) , Air Quality and Air Toxics

Description:

Perfluorocarbons, particularly perfluoroethane (C₂F₆) are used to clean chemical vapor deposition (CVD) chambers in the semi-conductor industry. Much of the C₂F₆ used is released to the atmosphere. Although the total release of C₂F₆ is relatively small, the global warming potential of this gas is so large that it contributes significantly to the greenhouse effect. The estimated lifetime of C₂F₆ in the atmosphere is at least 10,000 years, and its global warming potential is 13,500 times higher than that of carbon dioxide. Because of these environmental concerns, Du Pont, the major producer of C₂F₆ will require customers to emit no more than 20% of the chemical purchased after December 1996. The C₂F₆ used in a typical semiconductor plan has a recovery value of $0.50-1.00 million/year, providing, in addition, an economic incentive for recovery. Membrane Technology and Research, Inc., propose to develop and demonstrate an innovative membrane separation process to recover 80% to 95% of the C₂F₆ used in CVD operations

In the Phase I project, they will evaluate three candidate membrane materials for this application, develop thin-film composite membranes, and fabricate and evaluate bench-scale membrane modules. In Phase II, the process will be scaled up to the field demonstration stage.

Supplemental Keywords:

small business, SBIR, air emissions, engineering, chemistry, reuse, recycle., Sustainable Industry/Business, RFA, Air, Scientific Discipline, Industry Sectors, Manufacturing - NAIC 31-33, Chemical Engineering, Environmental Chemistry, Engineering, Chemistry, & Physics, Atmospheric Sciences, cleaner production/pollution prevention, climate change, Environmental Engineering, air quality, clean technology, membrane technology, environmental monitoring, global warming, environmentally conscious manufacturing, global change, air emissions, perfluoroethane recovery, climate variability, green house gas concentrations, perfluoroethane recovery , ambient emissions, emission control technologies, cleaner production, chemical vapor deposition, ambient air pollution, emissions contol engineering, semiconductor industry, chemcial vapor deposition, air pollution, greenhouse gases, industrial innovations, innovative technology, membrane separation process

Progress and Final Reports:

Final