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WASTE MINIMIZATION ASSESSMENT FOR A MANUFACTURER OF MICROELECTRONIC COMPONENTS
Citation:
WASTE MINIMIZATION ASSESSMENT FOR A MANUFACTURER OF MICROELECTRONIC COMPONENTS. U.S. Environmental Protection Agency, Washington, D.C., EPA600/S-94/015, 1994.
Description:
The U.S.Environmental Protection Agency (EPA) has funded a pilot project to assist small and medium-size manufacturers who want to minimize their generation of waste but who lack the expertise to do so. In an effort to assist these manufacturers, Waste Minimization Assessment Centers (WMACs) were established at selected universities, and procedures were adapted from the EPA Waste Minimization Opportunity Assessment Manual (EPA/625/7-88/003, July 1988). That document has been superseded by the Facility Pollution Prevention Guide (EPA/600/R-92/088, May 1992). The WMAC team at Colorado State University performed an assessment at a plant that manufactures microelectronic components. Thin-film circuitry is generated on sheet-alumina substrates using photolithography for pattern generation and vacuum-chamber vapor deposition to form circuit components. Integrated circuits and other components are attached to the ceramic substrates. The team's report, detailing findings and recommendations, indicated that the waste streams generated in the greatest quantities are rinse water and waste developer and that significant cost savings could be realized by installing flow meters and flow reducers in certain production areas.