You are here:
ENVIRONMENTAL RESEARCH BRIEF: WASTE REDUCTION ACTIVITIES AND OPTIONS FOR A MANUFACTURER OF SYSTEMS TO PRODUCE SEMICONDUCTORS.
Citation:
Ulbrecht, A. AND D. J. Watts. ENVIRONMENTAL RESEARCH BRIEF: WASTE REDUCTION ACTIVITIES AND OPTIONS FOR A MANUFACTURER OF SYSTEMS TO PRODUCE SEMICONDUCTORS. U.S. Environmental Protection Agency, Washington, DC, EPA/600/S-92/050 (NTIS 93-123222), 1992.
Impact/Purpose:
Information.
Description:
The U.S. Environmental Protection Agency (EPA) funded a project with the New Jersey Department of Environmental Protection and Energy (NJDEPE) to assist in conducting waste minimization assessments at thirty small- to medium-sized businesses in the state of New Jersey. ne of the sites selected was a facility that manufactures systems for vapor deposition of organometallic compounds or metals used in the production of semiconductors. s part of the manufacturing process it is necessary to test the systems using the materials actually used in semiconductor production. est deposition of materials containing arsenic, indium, or gallium, among others result in much of the waste streams. ite visit was made in 1990 during which several opportunities for waste minimization were identified. ptions identified include changes in degreasing procedures and modifications to filtering systems. mplementation of the identified waste minimization opportunities was not part of the program. ercent waste reduction, net annual savings, implementation costs and payback periods were estimated.