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Extramural Research

Grantee Research Project Results

Grantee Research Project Results

Journal Publications Details for:

Development of Life Cycle Inventory Modules for Semiconductor Processing
Grant Number R828208
RFA: Technology for a Sustainable Environment (1999)


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Journal Article (1)
Reference Type Citation Progress Report Year Document Sources
Journal Article Murphy CF, Kenig GA, Allen DT, Laurent J-P, Dyer DE. Development of parametric material, energy, and emission inventories for wafer fabrication in the semiconductor industry. Environmental Science & Technology 2003;37(23):5373-5382.
R828208 (Final)

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The perspectives, information and conclusions conveyed in research project abstracts, progress reports, final reports, journal abstracts and journal publications convey the viewpoints of the principal investigator and may not represent the views and policies of ORD and EPA. Conclusions drawn by the principal investigators have not been reviewed by the Agency.

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