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Extramural Research

Grantee Research Project Results

NCER Grantee Research Project Results

Journal Publications Details for:

Dry Lithography: Environmentally Responsible Processes for High Resolution Pattern Transfer and Elimination of Image Collapse using Positive Tone Resists
Grant Number R829586
RFA: Technology for a Sustainable Environment (2001)


Other views: All publications Selected publication types Publications submitted after final report

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The perspectives, information and conclusions conveyed in research project abstracts, progress reports, final reports, journal abstracts and journal publications convey the viewpoints of the principal investigator and may not represent the views and policies of ORD and EPA. Conclusions drawn by the principal investigators have not been reviewed by the Agency.

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